Abstract
We describe a high-throughput scanning X-ray fluorescence (XRF) microscopy setup using a microfocused synchrotron X-ray beam, which is optimized for in-parallel X-ray characterization of composition and crystalline structure of combinatorial samples. We present X-ray fluorescence elemental maps of a full ternary Co x Mn y Ge 1− x− y composition-spread thin film and discuss the quantitative analysis method used for obtaining the ternary composition.
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