Abstract
We describe a high-throughput scanning X-ray fluorescence (XRF) microscopy setup using a microfocused synchrotron X-ray beam, which is optimized for in-parallel X-ray characterization of composition and crystalline structure of combinatorial samples. We present X-ray fluorescence elemental maps of a full ternary Co x Mn y Ge 1− x− y composition-spread thin film and discuss the quantitative analysis method used for obtaining the ternary composition.
Full Text 
Sign-in/Register to access full text options
Sign-in/Register to access full text options 
Published version (
Free)
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
