Abstract

Performance of phase-modulation atomic force microscopy (PM-AFM) is investigated to achieve high force sensitivity and high-resolution imaging. PM-AFM detects the phase change of the oscillating cantilever relative to the excitation signal and uses it as the feedback signal. We compare the force sensitivity of PM-AFM with that of amplitude-modulation AFM (AM-AFM) theoretically as well as experimentally. We show that PM-AFM has a better signal-to-noise ratio than AM-AFM. We demonstrate that the electrostatic force images obtained by PM-AFM have clearer contrast than those obtained by AM-AFM.

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