High-responsiveness and high-power Fe-Pd magnetostrictive films prepared by magnetron sputtering

Abstract

ABSTRACT New high responsive Fe-Pd magnetostrictive films with high power were developed and prepared by magnetron sputtering. The in-plane magnetization of Fe-Pd thin film was larger than that of the Tb 0.3 Dy 0.7 Fe 2 alloy film. The Fe-Pd magnetostrictive films show large magnetostriction and high magnetostrictive susceptibility at low magnetic field from earth magnetic field to 1 kOe. The high magnetostrictive susceptibility of the Fe-Pd alloy films obtained was appropriate as a remote actuator in low magnetic field. If an ideal Fe-Pd magnetostrictive films are developed to apply the micro-machine, offering the advantages of low cost, lightweight and relatively simple design. In order to apply these properties to a practical actuator, load dependence of magnetostrictive susceptibility was serious potential problems. In this study, the magnetostrictive susceptibility changes were measured under different loading stresses. As a result, Fe-Pd alloy film showed high magnetostrictive susceptibility under high film loading stress above 50 MPa. Keywords : magnetostriction, actuator, high power, magnetostrictive susceptibility, Fe-Pd, alloy, film, magnetron sputtering, magnetization, Tb