Abstract

An ultrahigh vacuum scanning Kelvin probe force microscope (UHV SKPM) utilizing the gradient of electrostatic force, was developed based on an ultrahigh vacuum noncontact atomic force microscope (NC-AFM) capable of atomic level imaging, and used for simultaneous observation of contact potential difference (CPD) and NC-AFM images. CPD images of a Si(111) surface with Au deposited, clearly showed the potential difference in phases between 7×7 and 5×2 structures. When Ag was deposited as a submonolayer on the Si(111) 7×7 reconstructed surface, the atomic level lateral resolution was observed in CPD images as well as in NC-AFM topographic images.

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