Abstract
The high power bottom-emitting vertical-cavity surface-emitting lasers (VCSELs) and laser arrays emitting at 980 nm are reported. Extensive investigations on size scaling behavior of thermal properties of single devices show limits of attainable output characteristics. The maximum continuous wave (CW) output power at room temperature of single devices with aperture size up to 500 μm is as high as 1.95 W. The key characteristics such as maximum output power, wavelength and thermal resistance are discussed. The bottom-emitting arrays of 16 elements and 200 μm aperture size of individual elements show output power of CW 1.35 W at room temperature. The far-field angle is below 17° for all driving current, which is very favorable for focusing or collimating optics.
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