Abstract

A 200 watts excimer laser with excellent energy stability has been developed. The laser is based on the XMR model 5300, and thorough improvements were made over the XMR5300. The laser can produce a stable output of 200 watts (667 mJ, 300 Hz) under servo-controlled operation over 24 hours (greater than 25 million pulses). During this operation, the output fluctuation was found to be less than 1.5% for (sigma) and 10% for peak to peak. Horizontal and vertical beam divergences were less than 1 mrad and 4 mrad, respectively.

Talk to us

Join us for a 30 min session where you can share your feedback and ask us any queries you have

Schedule a call

Disclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.