Abstract
High power and high energy excimer lasers have been developed for various potential directed energy applications and for laser fusion. Depending on the application, high peak power, high average power or high pulse energy are required. Rare gas halide lasers pumped by electron beam or discharge and operating in the UV produce the highest output power and pulse energy. Raman beam combining in an excimer laser-pumped Raman amplifier has been used to produce very high beam quality and has made it possible to develop 'Raman Lookthrough' techniques. Properties of various excimer laser devices developed in the U.S. will be discussed from an historical point of view.
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