Abstract

The reversible semiconductor-to-metal transition of vanadium dioxide (VO2) makes VO2-based coatings a promising candidate for thermochromic smart windows, reducing the energy consumption of buildings. We report on a scalable sputter deposition technique for fast preparation of strongly thermochromic YSZ/V0.986W0.014O2/YSZ coatings, where YSZ denotes Y-stabilized ZrO2, on conventional soda-lime glass at a relatively low substrate surface temperature (350 °C) and without any substrate bias voltage. The thermochromic V0.986W0.014O2 layers and the antireflection YSZ layers were deposited using a controlled high-power impulse magnetron sputtering of a single V–W and Zr–Y target, respectively. A coating design utilizing a second-order interference in the YSZ layers was applied to increase both the integral luminous transmittance (Tlum) and the modulation of the solar energy transmittance (ΔTsol). We present the phase composition (X-ray diffraction) and microstructure (high-resolution transmission electron microscopy) of the coatings and their optical properties (spectrophotometry and spectroscopic ellipsometry). The YSZ/V0.986W0.014O2/YSZ coatings exhibit a transition temperature of 33–35 °C with Tlum = 64.5% and ΔTsol = 7.8% for a V0.986W0.014O2 thickness of 37 nm, and Tlum = 46.1% and ΔTsol = 13.2% for a V0.986W0.014O2 thickness of 67 nm. The results constitute an important step to a cost-effective and high-rate preparation of large-area thermochromic VO2-based coatings for future smart-window applications.

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