Abstract
Transparent PZT-based membranes were fabricated out of 200 mm silicon wafers thanks to an innovative layer transfer process. The ITO (100 nm)/PZT (1.16 µm)/ITO (150 nm)/SiO2 (8.7 µm) membrane stack shows an average transmission of about 75% in the visible spectrum. PZT film is highly (100) oriented and measured capacitors exhibit ferroelectric, dielectric and piezoelectric properties comparable to standard non-transparent PZT with metal electrodes. Piezoelectric actuation under applied voltage was verified through both static deflection and acoustic measurements. This first proof of concept opens the way to the fabrication of transparent piezoelectric transducers such as transparent PMUT devices. • A wafer-to-wafer transfer process of PZT layer stack. • Fabrication of transparent piezoelectric PZT-based membranes. • Demonstration of functionality of the PZT-based membranes in actuator mode.
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