Compact handheld digital holographic microscopy system development

Abstract

Development of a commercial prototype of reflection handheld digital holographic microscope system is presented in this paper. The concept is based on lensless magnification using diverging wave geometry and the miniaturized optical design which provides a compact packaged system. The optical geometry design provides the same curvature of object and reference waves and thus phase aberration is automatically compensated. The basic methodology of the system is developed and it further explored for 3D imaging, static deflection and vibration measurements applications. Based on the developed methodology an user-friendly software is developed suitable for industrial shop floor environment. The applications of the system are presented for 3D imaging, static deflection measurement and vibration analysis of MEMS samples. The developed system is well suitable for the testing of MEMS and Microsystems samples, with full-field and real-time features, for static and dynamic inspection and characterization and to monitor micro-fabrication process.