Highly transparent, all-oxide, heteroepitaxy ferroelectric thin film for flexible electronic devices

Abstract

Transparent flexible electronics have captured tremendous attention as the next-generation of electronic devices. Recently, flexible devices for wearing are in high demand in practical applications under special circumstances, such as aeronautics and astronautics, which require highly-transparent and large-scale flexibility, as well as stability at elevated temperature. Here, highly transparent, epitaxial Pb(Zr0.1Ti0.9)O3 (PZT) ferroelectric thin films were fabricated on Sn-doped In2O3 (ITO) transparent electrodes on yttria-stabilized zirconia (YSZ) bufferred mica substrate using pulsed laser deposition. The structural, optical, mechanical, and electrical properties of these all-oxide heterostructures of the PZT/ITO/YSZ/mica were studied. The heteroepitaxy exhibit a high transmittance and an excellent remarkable mechanical properties with robust operation in bending cycle tests. Moreover, the electrical properties are examined to show the preservation of the primitive properties of PZT. Various bending tests are performed to show the tunability of functionalities and to confirm that the heterostructures retain the physical properties under repeated cycles at high temperature. These results demonstrated that these high-performance transparent flexible capacitors would open a route for the applications in transparent flexible devices under harsh conditions.