Abstract
A highly tetrahedral, diamond-like form of hydrogenated amorphous carbon (a-C:H) with density of 2.9 g cm−3, sp3 fraction of 0.75, and hardness of 61 GPa, the highest values so far attained from a hydrocarbon source gas, has been deposited from acetylene in a novel plasma beam source. The ion energy for highest sp3 fraction is measured to be about 100 eV per C atom, similar to that for a-C, indicating that the subplantation deposition model of a-C also describes a-C:H.
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