Abstract
We have designed and fabricated a thin-film flux transformer by a YBa2Cu3O7/SrTiO3 (YBCO/STO) multilayer process. The flux transformer consists of a 20-turn input coil of 10 μm linewidth and a single-turn pickup loop surrounding an area of 7.5 by 7.5 mm2. All device levels are patterned by standard photolithography and Ar-ion-beam etching. The flux transformer has been combined in flip-chip configuration with the square washer of a low-noise YBCO dc SQUID. The dc SQUID magnetometer exhibits a magnetic field sensitivity of 1.4 nT/Φ0. The intrinsic white flux noise level of 70μΦ0/√Hz at 77 K is mainly dominated by the SQUID corresponding to a magnetic field resolution of the magnetometer of 100 fT/√Hz for frequencies above 40 Hz. At 1 Hz we measured 200 fT/√Hz. Biomagnetic measurements were performed in a magnetically shielded chamber.
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