Abstract
In this paper, the principles of the open-loop frequency-based signal processing devices for capacitive MEMS accelerometers are used to develop three CMOS IP-core (Intellectual Property core) projects of highly sensitive signal processing devices with frequency output. Signal processing devices designed in accordance with the considered method form an output of rectangular pulses whose frequencies equal a difference of signal frequencies from two identical generators with micromechanical accelerometer capacitive transducers in their frequency control circuits. First, the analog project scheme uses two harmonic LC oscillators and an analog mixer to form an output rectangular-shape differential-frequency signal, the frequency of which is dependent on the measured acceleration. Second, the digital project is fully scalable for various CMOS-technologies due to oscillators of rectangular pulses and a digital mixer. Third, the mixed-signal project combines the advantages of the analog and digital projects. The signal processing device projects were developed, modeled and compared to comprehensively solve the problems of increasing sensitivity, dynamic range, noise immunity and resistance to destabilizing factors (e.g., to temperature changes).
Highlights
Present-day micromechanical accelerometers are widely used in different types of transport and electronic means from aerospace, water and auto transport systems to mobile phones and new generation video game consoles [1,2,3,4,5,6]
We propose three open‐loop frequency‐based signal processing devices (SPD) IP‐core projects, which are compatible with the CMOS integrated circuits (IC) technologies
This paper focuses on open-loop frequency-based signal processing devices (SPD) for capacitive
Summary
Present-day micromechanical accelerometers are widely used in different types of transport and electronic means from aerospace, water and auto transport systems to mobile phones and new generation video game consoles [1,2,3,4,5,6]. Capacitive accelerometers accelerometers with voltage control closed-loop signal processing devices are characterized by higher linearity and wider dynamic range closed‐loop in comparison with open‐loop open-loop analogs. [16]; measuring the nanoscopic changes of Scalability complication of switching-capacitor switching‐capacitor closed-loop closed‐loop SPD integrated implementation for the technology generations. This work is devoted to a comprehensive solution of aforementioned problems by means of development and comparative analysis of three IP‐core projects of highly sensitive open‐loop signal development and comparative analysis of three IP-core projects of highly sensitive open-loop signal processing devices with frequency output for capacitive MEMS accelerometers.
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