Abstract
Quartz crystal resonators are suitable for digital output sensors due to their sensitivity to force. This paper presents a highly sensitive inclinometer sensor with a quartz resonator cluster. The force sensitive resonator cluster is designed on the quartz substrate to eliminate common-mode disturbances, such as temperature, as well as to improve sensitivity to force. The inclinometer sensor comprises two quartz resonator clusters that form a push-pull structure. The difference in inclination causes gravitational acceleration to produce an axial force along the input axis, with the resonance frequency shifting in proportion to the axial force. A signal processing and fusion scheme for the inclinometer sensor is presented and then tested. The results show that the scale factor of the sensor prototype is 3.5102 Hz/1' and that nonlinearity is 1.040% full scale in the range of -2°-+2°. The resolution of the inclinometer sensor is better than 0.0055°, making these devices a potentially attractive option for numerous precision inclination measurement applications.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
