Abstract
Highly ordered metal porous membranes containing Fe and Zr in different layers have been fabricated by successive ion-beam sputtering depositions of these metals onto a porous anodic aluminum oxide (AAO) membrane. Two different membrane configurations were studied: Zr/Fe/AAO and Fe/Zr/AAO. Morphology and composition of these multi-membranes have been characterized by Field Emission Scanning Electron Microscopy (FESEM), Atomic Force Microscopy (AFM), X-ray diffraction (XRD) and Rutherford Backscattering Spectrometry (RBS). The RBS analysis allowed a precise quantification of the atomic composition of the metal membrane and the support layer. The asymmetry and long tails observed for the metallic peaks in the RBS spectra indicate the different filling of the pores during the deposition. These results provide a possible structural configuration for the metal membranes, where Fe/Zr/AAO and Zr/Fe/AAO membranes follow different behaviors.
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