Abstract

A new analytic model is presented (the model is based on the induced current density distribution inside silicon substrate) to calculate frequency dependent mutual inductance and resistance per unit length of coupled on-chip interconnects in CMOS technology. The validity of the proposed model has been checked by a comparison with a quasi-TEM spectral domain numerical simulation and equivalent-circuit modeling procedure. It is found that the silicon semiconducting substrate skin effect must be considered for the accurate prediction of the high-frequency characteristics of VLSI interconnects.

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