Higher Eigenmodes Vibration Cantilever's Resonance Frequency and Cantilever Spring Constant

Abstract

Based on dynamics theory, we have built several structures models close to the real cantilever of atomic force microscope. This paper deduces the higher eigenmodes vibration of single-layer camped-free cantilever in the resonant frequency calculation formula, extend to derive the equation of the resonant frequency for the cantilever with a mass M* on the moving end, introduce and extend the design theory of thin-walled "equivalent" concept, establish the bi-layer or multi-layer film structure of the equivalent model, use the single-layer camped-free cantilever method discussed in the resonant frequency of the multi-layer cantilever beam. Make full use of the higher eigenmodes vibration model, to discuss the ideal condition of cantilever spring constant.