Abstract

At present the performance of short-pulse rare-gas-halide excimer-laser systems is definitely below that of solid-state systems, as far as the maximum peak-power is concerned. However, short-pulse excimer lasers are expected to be the best candidates to produce the highest focused intensities (I≳ 1020 W/cm2) provided by the shorter wavelength and less optical distortion in the gaseous active medium. This is especially feasible if the present performance of short-wavelength focusing optics is improved, and the problem of the limited extraction efficiency of excimers is solved. In this paper the results of former developments, novel methods, such as spatially-evolving chirped-pulse amplification, off-axis amplification, interferometric multiplexing, and some considerations for the achievable maximum brightness of table-top excimer systems are presented.

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