Abstract
Amorphous Si 3N 4, Si/C/N and crystalline SiC nanopowders of 5–50 nm in mean diameter were synthesized via laser-induced gas-phase reactions with yields of 250 g h −1 using low cost hexamethyldisilazane (HMDS) and NH 3 (or H 2). Reaction flame temperatures, which were controlled by the total gas flow rate, greatly influenced powder composition and crystallinity. Amorphous Si 3N 4 powders (96 wt.%) were obtained at 1000 °C, with HMDS+NH 3; β-SiC (93 wt.%) was formed at 1600 °C with HMDS+H 2. Amorphous Si/N/C powders with various N/C ratios (0.1–6) were synthesized at various temperatures. The main impurities in the powders were the organo-ligands such as NH X and CH X ( X=1–3), whose existence also resulted in a strong surface absorption of oxygen. Key techniques for commercial production of the abovementioned powders were also stated.
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