Abstract
New technologies in MEMS and new requirements through modified control systems in automotive applications will have to meet. Vast market opportunities and a large number of potential application fields have fuelled MEMS development efforts towards higher operating temperatures and harsher environments for almost a decade. The availability of these new MEMS technologies now facilitates the application of MEMS devices in automotive mass market applications. Key technologies and new concepts for sensor devices and systems are presented. A real breakthrough of these devices can be expected, provided that a close co-operation and coordination of systems designers and MEMS device developers can be initiated.
Published Version
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