High-temperature low-power performing micromachined suspended micro-hotplate for gas sensing applications

Abstract

Micromachined gas sensors that work at high temperatures, namely 700 °C or more, are necessary for some specific applications but they present a thermal cross-talk when they are integrated with other micromachined devices. In this paper we describe the fabrication steps and the implementation of a suspended micro-hotplate device for high temperature gas sensing applications, which presents a very low-power consumption. Simulations with the finite element model tool show that its integration with other micromachined devices is appropriate. The sensor device has been tested with BaSnO 3 under oxygen and CO atmospheres.