High-Temperature Capacitive Mode Pressure Sensor Based on SiC

Abstract

In order to realize high-accuracy pressure measurement in harsh environment, a new kind of Double-notches Touch Mode Capacitive Pressure Sensor (DTMCPS) based on SiC material is presented. Through research to material properties of the sensor, the sensor can be applied in high-temperature field. Using Finite Element Method (FEM) to simulate and solve capacitance, the results show that DTMCPS can immensely improve the sensitivity and the linear range of traditional single cavity sensor because of its double notches structure. Consequently, the sensor has outstanding measurement performance in high-temperature environment.