Abstract
In the paper, a Double-notches Touch Mode Capacitive Pressure Sensor (DTMCPS) is presented. The sensor employs a special SiC-AlN-SiC sandwich structure to achieve high-accuracy pressure measurement in high-temperature environment. The simulation analysis to the relation of capacitance and external pressure of the sensor shows that the sensor has higher sensitivity and longer linear range than traditional one. At the same time, the technical process of the sensor has been designed in the paper. The research shows that DTMCPS packaged in a high-temperature ceramic package can withstand higher temperature. Consequently, the sensor can be applied in high-temperature and harsh environment.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
