Abstract
The rapid development of photonic integrated circuits (PICs) and their applications in various fields of science and technology requires the creation of easy-to-manufacture high-speed integrated detectors. In this work, we fabricated and studied planar waveguide-integrated bolometers based on a thin film of single-walled carbon nanotubes (SWCNTs) on the silicon nitride platform. This bolometer showed good internal responsivity and a high bandwidth >1 GHz. In-depth analysis allowed us to retrieve the main parameters of the SWCNT film that govern the bolometric response that can be difficult to measure directly. The results obtained show a promising prospect of using SWCNT bolometers for PIC applications.
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