Abstract
We have developed a high-Tc SQUID probe microscope. A high permeability probe was used as a flux guide toimprove its spatial resolution. The SQUID head with the probe makes it possible tomeasure samples with high spatial resolution in air at room temperature. Toachieve a high spatial resolution, the microscope should have high signal to noise(S/N) ratio. We have investigated a modulation method of the static magneticfield emanating from a sample with the aim of achieving a higherS/N ratio. The sample stage was vibrated perpendicular to the plane of the SQUIDwith a frequency of 120 Hz by being mounted on a piezo stage attachedto a mechanical stage. The oscillation amplitude of the sample was about44 µm when the piezo stage was vibrated with amplitude20 µm. The SQUID output was connected to a lock-in amplifier, and the magnetic field signalwas obtained using lock-in detection. In order to evaluate the performance of thismodulation method, we measured static magnetic field distributions of fine meander linesand fine patterns of a Ni thin film. Observed line scans showed that the improvedS/N ratio of the SQUID microscope led to a higher spatial resolution.
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