Abstract
This study proposes a new design of piezoresistive microcantilever sensor with stress concentration regions (SCRs) at the clamped end and along the surface of the microcantilever. The SCRs greatly improve the sensitivity as well as can assist in the release of the microcantilever structure during microfabrication processes. In this study, our proposed design is compared with the conventional rectangular microcantilever by determining the deflection and stress characteristics. A commercial finite element analysis software ANSYS Multiphysics is used for obtaining the stress and deflection characteristics, as well as for piezoresistive analysis. The piezoresistor used in the simulation is p-doped silicon. The simulations are performed on a silicon microcantilever of size 200 × 100 × 1 µm having elastic modulus 130 GPa and Poisson’s ratio 0.28. The simulation results are verified with theoretical formulae and there is a good conformity between the results. Results show that the proposed microcantilever design has greater stress at the fixed end where the piezoresistor is placed, and exhibits twice the deflection as compared to the conventional rectangular microcantilever.
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