Abstract
Arrays of microcantilevers are increasingly being used as physical, biological, and chemical sensors in various applications. To improve the sensitivity of microcantilever sensors, this study analyses and compares the deflection and vibration characteristics of rectangular and trapezoidal profile microcantilevers. Three models of each profile are investigated. The cantilevers are analyzed for maximum deflection, fundamental resonant frequency and maximum stress. The surface stress is modelled as in-plane tensile force applied on the top edge of the microcantilevers. A commercial finite element analysis software ANSYS is used to analyze the designs. Results show paddled trapezoidal profile microcantilevers have better sensitivity.
Highlights
Generally used in topological investigations of surfaces such as in atomic force microscopy, arrays of microcantilevers are attracting much interest as sensors in a variety of applications
To increase simultaneously the deflection and resonant frequency of a microcantilever, this paper investigates the deflection and vibration characteristics of rectangular and trapezoidal profile microcantilevers having three different shapes
To improve the sensitivity of microcantilevers used in sensors, this study investigated rectangular and trapezoidal profile microcantilevers
Summary
Generally used in topological investigations of surfaces such as in atomic force microscopy, arrays of microcantilevers are attracting much interest as sensors in a variety of applications. Microcantilever sensors have emerged as a very powerful and highly sensitive tool to study various physical, chemical, and biological phenomena. It is the biosensing applications that are attracting the most interest in microcantilevers. Microcantilevers have been used in applications such as DNA hybridization [10], biomarking of myoglobin and kinase proteins [11], detection of biomarker transcripts in human RNA [12], assaying amyloid growth and protein aggregation [13], and DNA hybridization using hydration induced tension in nucleic acid films [14]
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