Abstract
This paper reports the developments toward an integrated, tri-axial, frequency-modulated, consumer-grade, and microelectromechanical system (MEMS) gyroscope. A custom low-power (160 μ A), low-phase-noise integrated circuit is designed specifically for frequency-modulated operation. Both yaw- and pitch-rate sensing systems are demonstrated by coupling the circuit with two novel micromachined structures fabricated with a 24- μ m-thick industrial process. In operation, both gyroscopes show a repeatable and stable scale factor, with less than 0.55% of part-to-part variability, obtained with no any calibration, and 35 ppm/ $^{\circ }$ C of variability over a 25–70 $^{\circ }$ C temperature range.
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