Abstract
A survey will be given on recent advances in the investigation of semi- conductor epilayers, heterostructures and superlattices using reciprocal space mapping techniques based on triple-axis diffractometry. It is shown that X-ray reciprocal space mapping yields quantitative information on strain, strain relaxation, as well as composition in such structures. These data are obtained from analyses of the isointensity contours of scattered X-ray inten- sity around reciprocal lattice points. Further analysis of the diffuse scattering yields also information on defect distribution in the epilayers.
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