Abstract

A high resolution spectral-domain optical coherence tomography (SD-OCT) system based on a thermal light source was presented. A novel normalized method was introduced to remove the background noise and the DC noise of the interference spectrum. A Gaussian spectral calibration procedure was performed to improve axial resolution and image quality before reconstructing OCT image. With the proposed method, the quality of the obtained images was greatly improved. Two-dimensional (2D) cross-sectional images with axial resolution of 1.2 μm were obtained. Furthermore, the film thickness of single-layer film sample was obtained. The experimental result demonstrates the SD-OCT system has potential for film thickness measurement and surface topography.

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