High resolution, position sensitive detector for energetic particle beams

Abstract

The performance and design of an imaging position sensitive, particle beam detector will be presented. The detector is minimally invasive, operates over a wide dynamic range (> 10 10), and exhibits high spatial resolution. The secondary electrons produced when a particle beam passes through a thin foil are imaged using stigmatic ion optics onto a two-dimensional imaging detector. Due to the low scattering cross section of the 6 nm carbon foil the detector is a minimal perturbation on the primary beam. A prototype detector with an image resolution of approximately 5 μm for a field of view of 1 mm has been reported [R.W. Odom, M.D. Strathman, S.E. Buttrill, Jr., and S.M. Bauman, Nucl. Instr. and Meth. B44 (1990) 465]. A higher resolution detector for imaging small beams (< 50 μm) with an image resolution of better than 0.5 μm has since been developed and its design is presented.