Abstract
We have developed a technique using a photothermal microscope from which we can make a thermal image of an electronic component working at a “high frequency” using a charge coupled device (CCD) camera and a multichannel lock-in scheme. To do this, we have created an electronic “stroboscope”: the frequency F of the thermal signal induced by a high frequency electrical excitation and the frequency of the light F+f that illuminates the device are next to each other; the signal reflected at the surface of the device whose amplitude is proportional to the variation of reflectivity and hence to the variation of temperature and whose frequency is the blinking one f is analyzed by a visible CCD camera. Amplitude and phase images of the high frequency thermal phenomenon can then be made. Moreover, this technique presents a great advantage: the spatial resolution is better than 1 μm. The amplitude and phase images presented show, with a very good spatial resolution, Joule and Peltier heating of a polycrystalline silicon 2.5 kΩ resistor across which a sinusoidal current is forced.
Published Version
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