High resolution patterning on AgInSbTe thin films by laser thermal lithography

Abstract

Fabrication of high-resolution micro-structures is essential for DOEs and MEMS and has attracted increasing attention. In this study, several high-resolution micro-structures have been fabricated on AgInSbTe phase-change films by laser thermal lithography, and the minimum linewidth of these structures is about 200 nm, which is smaller than the size of the focused spot. The results indicate that laser thermal lithography is a simple and effective technique for the fabrication of micro-structures on AgInSbTe phase-change thin films.