High resolution microfabrication of hard materials with diode-pumped solid state (DPSS) UV laser

Abstract

This paper discuses emerging applications of an industrial grade, short-pulse (~15nsec), high peak power (>0.2MW) DPSS laser in the automotive and semiconductor industries. Devices like multi-chip modules, chip scale packages and fuel injectors require micrometer-scale processing. Micromachining precision and speed are in the critical path as manufacturing technologies for these devices advance from conventional techniques to laser-based methods. The use of high peak power DPSS laser for routine micro machining of metals (over 1mm thick), silicon and also ceramics and diamond to quality levels and feature sizes that surpass existing technologies are shown. Specific benefits of shorter wavelength, shorter pulse length and high peak power for micro fabrication of holes, grooves and slots with minimum recast, micro cracking, and high aspect ratios are discussed. The specifics of DPSS laser technology are reviewed from the standpoint of suitability for high duty cycle operation in industrial environments, offering increased tool flexibility and lower operating cost than current technologies like EDM or chemical processing.This paper discuses emerging applications of an industrial grade, short-pulse (~15nsec), high peak power (>0.2MW) DPSS laser in the automotive and semiconductor industries. Devices like multi-chip modules, chip scale packages and fuel injectors require micrometer-scale processing. Micromachining precision and speed are in the critical path as manufacturing technologies for these devices advance from conventional techniques to laser-based methods. The use of high peak power DPSS laser for routine micro machining of metals (over 1mm thick), silicon and also ceramics and diamond to quality levels and feature sizes that surpass existing technologies are shown. Specific benefits of shorter wavelength, shorter pulse length and high peak power for micro fabrication of holes, grooves and slots with minimum recast, micro cracking, and high aspect ratios are discussed. The specifics of DPSS laser technology are reviewed from the standpoint of suitability for high duty cycle operation in industrial environments, off...