Applications of short pulsed UV lasers

Abstract

Excimer and UV diode-pumped solid-state (DPSS) lasers are both robust, production-capable systems used in a wide range of applications in microfabrication, surface treatment and materials processing. The potential of these lasers for semiconductor, solar, medical and other industries leads to the development of applications that often could not be performed by other mechanical, chemical or laser fabrication methods. Excimer lasers offer maximum power and the shortest wavelength (351, 308, 248, 193 and 157 nm) of all narrow-band UV sources, with a large beam that provides unique homogeneous illumination of large areas. DPSS lasers offer excellent beam quality and the highest repetition rate providing the smallest beam size for micro features. Typically the DPSS lasers we use are vanadate (Nd:YVO4)-based producing an IR beam. Efficient frequency conversion allows us to use these lasers at 355 nm and 266 nm with several watts of available power.In this paper the most current applications of short pulsed nanosecond UV lasers are reviewed. Excimer lasers are ideal sources for large-area patterning, annealing, and laser lift-off. Micromachining is a wide area where both excimer and DPSS lasers are used. Silicon carbide, silicon, sapphire, III-V semiconductors (gallium arsenide, indium phosphide, gallium phosphide) and III-nitrides such as gallium nitride and aluminum nitride, are materials routinely machined by both excimer and DPSS lasers in applications such as scribing, cutting and via drilling. In addition, these lasers are also used for micromachining other ceramics, polymers and metals.Excimer and UV diode-pumped solid-state (DPSS) lasers are both robust, production-capable systems used in a wide range of applications in microfabrication, surface treatment and materials processing. The potential of these lasers for semiconductor, solar, medical and other industries leads to the development of applications that often could not be performed by other mechanical, chemical or laser fabrication methods. Excimer lasers offer maximum power and the shortest wavelength (351, 308, 248, 193 and 157 nm) of all narrow-band UV sources, with a large beam that provides unique homogeneous illumination of large areas. DPSS lasers offer excellent beam quality and the highest repetition rate providing the smallest beam size for micro features. Typically the DPSS lasers we use are vanadate (Nd:YVO4)-based producing an IR beam. Efficient frequency conversion allows us to use these lasers at 355 nm and 266 nm with several watts of available power.In this paper the most current applications of short pulsed nano...