Abstract
Kelvin Force Microscopy (KFM) is a very powerful tool for mapping of surface charges, surface potentials, and doping profiles. [1] This technique is implemented in amplitude modulation and frequency modulation Atomic Force Microscopy (AFM) modes. [2] In many applications surface electric properties are measured with two-pass technique in which a “spill over” of topographic response to the probe motion is reduced by lifting the probe over a sample surface during detection of electric signals. Such approach has also severe limitations in sensitivity and lateral resolution due to a remote probe position during the lift scan. A separation of topographic and electrostatic responses is also possible by operating topography and electric-response servo loops at different frequencies that enable single-pass KFM with simultaneous studies of sample topography and surface potential. The latter is measured by voltage applied to the probe that nullifies its electrostatic interaction with a sample.
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