High-resolution 3D imaging method using chirped optical frequency combs based on convolution analysis of the spectral interference fringe

Abstract

We applied an imaging optical system and convolution analysis to a one-shot 3D imaging method with a chirped optical frequency comb to greatly improve the transverse spatial resolution and depth accuracy. We obtained the high contrast spectral interference of a diffusive surface using the designed lens system and developed a simple and robust analysis technique using convolution of an obtained the interference fringe. The developed method was demonstrated to realize submicron-level uncertainty for the depth measurement. When applied to the surface structure of a coin, it demonstrated a transverse spatial resolution of 8.98 lp/mm and depth resolution of 0.35 µm.