High repetition rate pulsed power generator using IGBTs and magnetic pulse compression circuit

Abstract

Recently, all solid-state pulsed power generators, which are operated with high repetition rate, long lifetime and high reliability, have been developed to be used for industrial applications, such as high repetition rate pulsed gas lasers, high energy density plasma (EUV sources) and pulse ozonizer. Requirements of these applications are repetitive fast rise time pulsed power. Recently, semiconductor power device technology has improved the performance of fast high voltage switching and low switching loss. In particular, insulated gate bipolar transistor (IGBT) is highly efficient semiconductor switching device. However, the IGBT switch is still not sufficient to drive the pulse laser and the pulse ozonizer themselves. In practical systems, semiconductor switches are used with the assistance of magnetic switches. We have studied and developed high repetition rate small size pulsed power generator for generation of discharge plasma. This generator consists of an IGBT switch circuit, a step-up pulse transformer and magnetic pulse compression circuit (MPC). This generator is able to generate an output voltage of about 14kV with voltage rise time of less than 100 ns. And repetition rate are up to 2000 pulses per second (pps). We did the operation test and generate the streamer discharge with 2000 pps.