Abstract
Recently, high repetition rate, long lifetime, and high reliability pulsed power generators have been developed using semiconductor switches. We have studied and developed an all solid-state pulsed power generator for industrial applications such as a high repetition rate pulsed gas laser and a pulsed ozonizer. Recently, semiconductor power device technology has improved the performance of fast high-power switching devices. However, the semiconductor switch is still not sufficient to drive the pulse laser and the pulse ozonizer directly. Therefore, the semiconductor switch can be used in practical application with the assistance of a magnetic switch and a gate driving technique. This all solid-state generator consists of a semiconductor switch and a magnetic switch. The progress of high repetition rate pulsed power generators is reviewed herein, with particular emphasis on pulse power conditioning by solid-state switching techniques.
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