Abstract
A high repetition-rate excimer laser has been developed, in which a 4-stage axial blower circulates the laser gas up to 120 m/s. The discharge region of 10 × 20 × 610 mm3 is UV-preio-nized by pin sparks located along both sides of main electrodes. The output characteristics of XeCl laser were optimized for high repetition rate operations, varying conditions such as total gas pressure, gas mixture ratio, and applied voltage. High Xe contents were found to deterio-rate the laser stability. The residual Xe2+ and Cl ions localized on the cathode surface are sup-posed to generate filamentary channels, which cause laser energy reduction. Stable 4 kHz op-eration was achieved at a clearance ratio CR =3 with 200 W average laser power in a gas mix-ture of Xe/HCl/He=1.06/0.27/177 kPa.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
