Abstract
A 5 kHz high repetition rate excimer laser has been developed. An average laser power of 0.56 kW at 5 kHz operation, which remains stable for 1 s, is obtained. This duty time is limited only by overheating of the switching thyratrons. The 5 kHz operation is attained by some improvements to the gas conditions, the UV-preionization scheme, and the gas flow speed in the discharge region. The gas is circulated at an effective flow velocity of 137 m/s by a newly developed two-stage axial blower. The gas conditions are optimized experimentally to achieve 5 kHz operation. To obtain uniform preionization, the locations of pin electrodes for the preionization are determined on the basis of numerical results.
Published Version
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