Abstract
High reflectivity (>90%) distributed Bragg reflectors (DBR) have been successfully produced utilizing the AlGaN/AlN material system. We present reflectivity and XRD data of Ga-polar AlxGa1—xN/AlN Bragg reflectors grown on sapphire. High peak reflectivities between 54% (5.5 period mirror) and 97% (25.5 period mirror) combined with large reflectivity FWHM of 30 nm have been found. All reflectors have been designed by ex-situ spectroscopic ellipsometry (SE) data of respective reference samples.
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