Abstract

We have investigated the structural, electrical and optical properties of thin films of zinc oxide deposited by laser ablation. We find that even at room temperature the films are c-axis oriented on both crystalline and amorphous substrates. The electrical dc resistivity is independent of substrate temperature and is about 2–3 mΩ cm −1. The films have low absorption coefficient in the visible part of the spectrum and represent some of the best ZnO films deposited at low temperature.

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