Abstract
We present a comprehensive study of internal quality factors in superconducting stub-geometry three-dimensional cavities made of aluminum. We use wet etching, annealing, and electrochemical polishing to improve the as machined quality factor. We find that the dominant loss channel is split between the two-level system loss and an unknown source with a 40:60 proportion. A total of 17 cavities of different purity, resonance frequency, and size were studied. Our treatment results in reproducible cavities, with 10 of them showing internal quality factors above 80 × 106 at a power corresponding to an average of a single photon in the cavity. The best cavity has an internal quality factor of 115 × 106 at a single photon level.
Highlights
Among different types of harmonic oscillators, three-dimensional (3D) cavities have long lifetimes[2,3] and have been successfully integrated with qubits.[1,6,7,8,9] Out of different 3D cavity geometries, stub-geometry 3D cavities have been demonstrated to have millisecond lifetimes[1] at a single photon level with strong dispersive coupling to the qubit
We present a comprehensive study of internal quality factors in superconducting stub-geometry three-dimensional cavities made of aluminum
A recipe on how to make these cavities can be found in Reagor et al.,[1] there is no systematic study on how the different parameters and treatments influence the internal quality factor
Summary
Among different types of harmonic oscillators, three-dimensional (3D) cavities have long lifetimes[2,3] and have been successfully integrated with qubits.[1,6,7,8,9] Out of different 3D cavity geometries, stub-geometry 3D cavities have been demonstrated to have millisecond lifetimes[1] at a single photon level with strong dispersive coupling to the qubit. ABSTRACT We present a comprehensive study of internal quality factors in superconducting stub-geometry three-dimensional cavities made of aluminum. We use wet etching, annealing, and electrochemical polishing to improve the as machined quality factor.
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