Abstract
N-doped ZnO films have been grown on (0 0 0 1) sapphire substrates by a novel low-pressure plasma-assisted metalorganic chemical vapor deposition system using N 2O plasma as doping source. X-ray photoelectron spectroscopy analysis confirmed the incorporation of N into the ZnO films. Room temperature p-type conduction was achieved for the N-doped ZnO film at suitable substrate temperatures, with the resistivity of 8.71 Ω cm, hole concentration up to 3.44 × 10 17 cm −3 and mobility of 2.09 cm 2/V s. In the photoluminescence (PL) measurement, a strong near-band-edge emission was observed for both undoped and N-doped films, while the deep-level emission was almost undetectable, which confirmed that the obtained ZnO-based films were well close to stoichiometry and of optically high quality.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
