High-Quality Factor Superconducting Flexible Resonators Embedded in Thin-Film Polyimide HD-4110

Abstract

We present the design, fabrication procedure, and measurement results of Nb superconducting microstrip transmission line resonators fabricated using thin-film polyimide HD-4110, including both nonembedded and embedded versions. These resonators were used to characterize the microwave dielectric loss tangent of 20 $\mu$ m thick polyimide HD-4110 at deep cryogenic temperatures. We observed high-quality factors ( Q ) up to 21 040 at 1.2 K in the frequency range of 2–21 GHz for nonembedded resonators, indicating that the dielectric loss tangent can be less than 5 $\times$ 10−5. Embedded resonators with an additional 20 $\mu$ m thick encapsulation layer also exhibited Q values as high as $\sim 19$ 200. Dielectric and conductor (quasiparticle) loss have been compared between the two types of resonators. This study provides information applicable to the design of future high-density, flexible, multilayer superconducting cables, which are of great interest for potential applications in cryogenic electronics systems, including quantum computers.