Abstract
We report and characterize the growth of defect-free AlSb bulk material on Si (001) substrates using a monolithic self-assembled AlSb quantum dot (QD) nucleation layer. During the first few monolayers of AlSb growth on Si, highly crystalline QDs form. With continued deposition, the islands coalesce into a planar material with no detectable defects. The QD nucleation layer facilitates a completely relaxed AlSb within ∼100 ML of deposition according to x-ray diffraction. We attribute the success of AlSb growth on Si to both the large AlSb∕Si lattice mismatch (Δa0∕a0=13.5%) in combination with the strong AlSb atomic bond. We also demonstrate room temperature photoluminescence from an InGaSb QW grown on the AlSb bulk layer.
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More From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
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