Abstract

Most electric discharge pumped excimer laser with x-ray preionization use water transmiss-ion line as power supply, in this paper, a lumped low inductance capacitor bank was used for deriving the x-ray preionized XeCl laser to increase the laser output energy density. In case of the water transmission line, the laser pulse was a sharp spike with FWHM of 65 ns and the specific laser energy of 6 Joule / liter, with low inductance capacitor bank, the laser pulse duration was increased to 85 ns with specific laser energy as high as 9 Joule / liter. The superior characteristics of the low inductance capacitor bank to the water transmission line are very effective for repetitive pulse operation with pulse energy of 1.5 Joule at 25 pps. The effects of gas flow velocity and input energy density on the laser performance were studied in detail.

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