Abstract
With a high uniformity of x-ray preionization, a long pulse duration and a high specific energy (9 J l -1), an XeCl excimer laser output has been obtained by using a compact low inductance capacitor bank as the laser excitation circuit. The superior features of the low inductance capacitor bank (LICB) compared to the water transmission line (WTL) are attractive for repetitively pulsed XeCl excimer lasers.
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